Micro-patterning of Si(100) surfaces by ethanol cluster ion beams
نویسندگان
چکیده
منابع مشابه
Molecular depth profiling with cluster ion beams.
Peptide-doped trehalose thin films have been characterized by bombardment with energetic cluster ion beams of C60+ and Aux+ (x = 1, 2, 3). The aim of these studies is to acquire information about the molecular sputtering process of the peptide and trehalose by measurement of secondary ion mass spectra during erosion. This system is important since uniform thin films of approximately 300 nm thic...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2011
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.04.051